Application of Ta_2O_5 in Microelectronics and Moems

机译：Ta_2O_5在微电子学和记忆学中的应用

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Tantalum pentoxide is a kind of high-index, high reflectivity dielectric material, extensively applied in MOEMS, Microelectronics and other related industries. The properties, productions, market, and price of the material are summarized. The paper also discusses the various main standard fabrication processes of Ta_2O_5 and its incoming applications in many fields such as DRAM, high volume capacitors, waveguides etc..

机译：五氧化二钽是一种高折射率，高反射率的介电材料，广泛应用于MOEMS，微电子等相关行业。总结了材料的特性，生产，市场和价格。本文还讨论了Ta_2O_5的各种主要标准制造工艺及其在DRAM，大容量电容器，波导等许多领域的传入应用。

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《ISTM/2001: 4th International Symposium on Test and Measurement》|2001年|p.1662-1666|共5页
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Li Yonghong; Noell Wilfried; Dong Haifeng; Nico F. de Rooij; Zhang Wendong;
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中图分类无线电电子学、电信技术;
关键词
Ta_2O_5; MOEMS; MEMS; microelectronics; MOCVD; sputtering;

机译：Ta_2O_5; MOEMS; MEMS;微电子学; MOCVD;溅射;

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4. Application of Ta_2O_5 in Microelectronics and Moems [C] . Li Yonghong, Noell Wilfried, Dong Haifeng, International symposium on test and measurement . 2001

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Application of Ta_2O_5 in Microelectronics and Moems

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