Micro-optoelectromechanical systems (MOEMS) have developed into a unique class of micromachines that specialize in sensing and spatial-temporal modulation of electromagnetic radiation. Silicon-based substrates are the standard developmental platform for MOEMS devices as they are widely available, versatile, and offer the advantage of large-volume manufacturing at low cost. New materials, sophisticated fabrication processes, and designs have been proposed. They have led to a series of MOEMS devices with the potential to create novel functionality or simply replace existing methods. Two large-volume markets are within reach: picoprojection displays and optical telecommunications.
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