Laser and Camera Inspection Technologies for On-Line Defect Detection

摘要

Manufacturers of microelectronics media (ceramics, film, foil, etc.) are under enormous pressure to maximize throughput rates, while maintaining high quality and yield. Automatic inspection systems can achieve these objectives, concurrently, if the correct inspection system is installed. The difficulty is matching the inspection problem against a dizzying array of inspection system solutions. Inspection system design represents the integration of four disciplines - optics, electronics, mechanical engineering and software. The disciplines must play together, as a system, like a symphony. And, like a symphony, there are lead disciplines and supporting disciplines. This paper serves as a guide for MCM manufacturers who must address the issue of on-line inspection of base material, laminates and coatings. It defines the underlying principles behind the selection of an inspection system. The optical solution is presented as the critical issue. Laser and camera technologies are compared and guidelines for the selection are given.