A MEMS components model library is implemented within the Cadence~(~R) simulation framework, yielding to a hierarchical, fully mixed-domain design environment based on an IC-design framework. The modelling tools are matrix based structural analysis and analogue hardware description language SpectreHDL~(~R), while finite element method simulations are used as a validation tool. The benefits of the obtained top-down multi-domain design apprach are demonstrated through the design of a MEMS varactor, to be inserted within a CMOS radio frequency voltage controlled oscillator. Gained access to both electrical and mechanical parameters and quantities during static and dynamic simulations proves to be the key tool for aiming at overall optimum design.
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