This work presents the development of a fabrication technology for a silicon-based microcoluran for gas chromatographic measurements. The system consists of two main components: ⅰ.) the silicon wafer micromachined separation capillary column and ⅱ.) the metal oxide semiconductor detector made on silicon membrane. The final goal will be to realize low cost and portable miniaturized system expressly designed for the detection of infant neuroblastoma tumor. In this preliminary work both simulation and technological aspects have been considered for the fabrication. The microcolumn design has been performed in order to optimise the separation factor. Silicon micromachining techniques have been applied to the fabrication of the device.
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