Li-, Zn- and Au-doped Fe{sub}2O{sub}3 thin films have been investigated as humidity sensing materials. Depending on the nature and loading of the dopant, microstructural modifications on the host metal oxide have been observed. The humidity sensing properties of these films were studied by means of Electrochemical Impedance Spectroscopy (EIS). Humidity sensing data have been then analysed by an electrical modeling and correlated to the microstructural characteristics.
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