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2D Anemometer Based on Multichannel Single Chip Flow Sensor

机译:基于多通道单芯片流量传感器的2D风速计

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A compact 2D wind sensor made up of an integrated, single chip, double channel flow sensor and a PMMA cylinder is proposed. The flow sensor is a standard micro calorimeter designed with a commercial CMOS process and thermally insulated from the substrate by means of a post-processing technique. The cylinder has two orthogonal active sections with an original channel configuration that connects the outer surface of the cylinder surface to the flow sensor. The optimization of the channel configuration allows to obtain a cosine dependence of the measured flow on the wind direction.
机译:提出了一种由集成,单芯片,双通道流量传感器和PMMA气缸组成的紧凑型2D风传感器。流量传感器是标准微量热量计,其设计有商业CMOS工艺,并通过后处理技术与基板隔热。圆筒具有两个正交的有源部分,其具有原始通道配置,其将气缸表面的外表面连接到流量传感器。通道配置的优化允许获得在风向上测量的流动的余弦依赖性。

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