Anemometer to measure air flow; has heating resistance and temperature-sensing resistance, which are arranged on common sensor chip made of electrically insulating material

摘要

The anemometer has a heating resistance (4) and a temperature-sensing resistance (3), which are arranged on a common sensor chip (1) made of an electrically insulating material. The resistances may be on the same side of the sensor chip or the heating resistance may be on the front of the chip and the temperature-sensing resistance on the back of the chip, with the heating resistance covering the same area as the temperature-sensing resistance.