SINGLE CHIP INTEGRATED TYPE MULTICHANNEL MAGNETOMETRIC SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a single chip integrated type multichannel magnetometric sensor setting a magnetic measurement point with an accurate pitch and suppressing thermal noise.;SOLUTION: A plurality of SQUID sensors 10 including a pick up coil 1, a Josephson junction 2, a shunt resistor 3, a damping resistor 4, and a feed back coil 5 are formed on one substrate 11 in a two-dimensional array by a semiconductor thin film process. This is suitable for magnetoencephalo and magnetocardio measurement of a small animal.;COPYRIGHT: (C)2007,JPO&INPIT