Radio frequency sputtering nad plasma spraying surface engineering methods were introudced to join aluminum nitride ceramic to metals. The effect ofsurface modificaiton Al or Ti film on the bond strength of joining AIN ceramic to metals was studies bases on the process conditions, microstructures, reaction products and residual stresses distributions of AIN/interlayer/metal joints. R.F.sputtering was first applied to deposited surface modification aluminum or titanium film on AIN ceramic. Then brazing with AGCU19.5Ti3In5 filler nad idffusio bonding proceses were investigated to join the different surface modified AIN ceramics to Cu and FeNi42 metals. The strength of the joints was improved because the interfacial surface modification AL or Ti film imporved the wettability of AIN. The maximum bond strength of 127 MPa and 176MPa could be obtained for brazing surface modified AIN to Cu and to FeNi42 respectively at 1173K for 20min. And the bond strength of diffusion bonding AIN to C joint could be improved further with a functionally gradient material interlayer coated using p;asma spaying
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