Structural, Morphological and infrared detection properties of Mn-Co-Ni-O spinel oxide films

摘要

Mn-Co-Ni-O spinel oxide materials, with the prototype of AB_2O_4, are excelled in uncooled thermal sensing and infrared detection due to its high absolute NTC value and moderate resistivity at room temperature. In this work, Mn_(1.56)Co_(0.96)Ni_(0.48)O_4 film (MCN-CSD) and Mn_(1.40)Co_(1.00)Ni_(0.60)O_4 (MCN-RF) film are fabricated on amorphous sapphire substrate with chemical solution method (CSD) and radio frequency deposition method (RF), respectively. Morphological characteristics are revealed by SEM graphs. And the result shows that MCN films acquire better crystalline properties and compactness than MCN bulk materials. To verify the excellent features for infrared detection, detectors sized 1mm~2 × 0.17 μm and 1 mm~2 × 0.33 μm are fabricated based on MCN-RF and MCN-CSD films, respectively. The excess noise at 11 Hz for each detector has been tested and the Hooge's parameters have been calculated. The MCN films obtained by RF deposition and CSD method both show γ/n value of about 2×10~(-21) cm~3, an order lower than bulk MCN and amorphous silicon, which indicates great potentials in integrated infrared detection.