STUDIES OF DIELECTRIC PROPERTIES OF PULSED LASER DEPOSITED (Ba, Sr)TiO_3 FILMS USING LaNiO_3 AS CONDUCTIVE ELECTRODE

摘要

LaNiO_3 (LNO) films were used as conductive bottom and top electrodes for the fabrication of (Ba_(0.5)Sr_(0.5)) TiO_3 (BST) capacitors on silicon substrates. LNO as well as BST films were grown in-situ using a pulsed laser deposition technique with no subsequent heating or oxygenation treatments. Capacitance and leakage current measurements of BST films were carried out using LNO/BST/LNO/Si structures. Using these measurements, the dielectric constant and leakage current of BST films were found to be ～250 and ～10~(-8) A/cm~2, respectively. The results obtained in the present study suggest that LNO is a good contact electrode material for BST films in the fabrication of BST capacitors with good structural and electrical properties.