SrTiO_3/BaTiO_3 ARTIFICIAL SUPERLATTICES OBTAINED BY INJECTION MOCVD

摘要

SrTiO_3/BaTiO_3 superlattices were deposited using injection MOCVD. The films obtained on LaAlO_3(LAO), Al_2O_3, SrTiO_3(STO) and SrTiO_3:Nb(STO:Nb) were charcterized using X-ray diffraction While the films on LaAlO_3 (012), SrTiO_3 (100) and SrTiO_3:Nb (100) were epitaxial, the multilayers deposited on Al_2O_3(0001)were highly oriented, but displaying two different in-plane orientations To our knowledge, this is the first time that BTO/STO superlattices were deposited by MOCVD.