MOCVD reactors shower head , MOCVD reactor , MOCVD equipment and cleaning method

摘要

PROBLEM TO BE SOLVED: To provide a shower head, an MOCVD reactor, and an MOCVD device which are improved.;SOLUTION: In one example embodiment, the shower head for an MOCVD reactor includes: a shower head body part which has a plurality of reactive gas supply paths formed therein so as to pierce the shower head in a thickness direction and has a cooling structure; and a shield plate which is removably attached to the shower head body and has 1-to-n manifold structures formed in portions corresponding to formation positions of respective reactive gas supply paths in the shower head body, so as to pierce the shower head in the thickness direction and does not have a cooling structure.;COPYRIGHT: (C)2013,JPO&INPIT