Evaluation of PAE-2 and FOX-15 as Low Dielectric Constant Materials for ULSI Interconnect Applications

机译：评估PAE-2和FOX-15作为ULSI互连应用中的低介电常数材料

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In this work we have investigated and compared the material characteristics of two low-k spin-on products: FOX-15 from Dow Corning and PAe-2 from Scumacher. The application of low-k to Cu metallization was also investigated.

机译：在这项工作中，我们研究并比较了两种低k旋涂产品的材料特性：道康宁公司的FOX-15和Scumacher公司的PAe-2。还研究了低k在铜金属化中的应用。

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《International VLSI multilevel interconnection conference;VMIC》|1997年|p.603-605|共3页
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S.C. Sun; Y.C. Chiang;
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中图分类无线电电子学、电信技术;
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Evaluation of PAE-2 and FOX-15 as Low Dielectric Constant Materials for ULSI Interconnect Applications

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