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Fabrication and characterization of mesoporous dielectric materials for ULSI interconnect applications

机译：ULSI互连应用中介孔介电材料的制造与表征

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Suzhu Yu;
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1. Fabrication and characterization of well-dispersed and highly stable PtRu nanoparticles on carbon mesoporous material for applications in direct methanol fuel cell [J] . Liu SH, Yu WY, Chen CH, Chemistry of Materials: A Publication of the American Chemistry Society . 2008,第4期

机译：碳介孔材料上分散良好且高度稳定的PtRu纳米颗粒的制备与表征，用于直接甲醇燃料电池
2. Amorphous carbon based materials as the interconnect dielectric in ULSI chips [J] . A. Grill Diamond and Related Materials . 2001,第2期

机译：非晶碳基材料作为ULSI芯片中的互连电介质
3. Structural and Electrical Characterizations of Low-Dielectric-ConstantSiOC(-H) Thin Films Deposited by Using Plasma-Enhanced ChemicalVapor Deposition for ULSI Interconnects [J] . Chang Young KIM, An Soo JUNG, Rangaswamy NAVAMATHAVAN, Journal of the Korean Physical Society . 2008,第1期

机译：用于ULSI互连的等离子增强化学气相沉积法沉积低介电常数SiOC（-H）薄膜的结构和电学特性
4. Poly(arylene ether)s as low dielectric constant materials for ulsi interconnect applications [C] . Raymond N. Vrtis, Kelly A. Heap, William F. Burgoyne, International VLSI multilevel interconnection conference;VMIC . 1997

机译：聚（亚芳基醚）作为ulsi互连应用的低介电常数材料
5. Critical properties and reliability of low-k dielectrics for ULSI interconnect applications: Thickness and temperature dependence. [D] . Kim, Hyungkun. 2001

机译：用于ULSI互连应用的低k电介质的关键特性和可靠性：厚度和温度依赖性。
6. Dielectric Characterization of PCL-Based Thermoplastic Materials for Microwave Diagnostic and Therapeutic Applications [O] . Suzette M. Aguilar, Jacob D. Shea, Mudar A. Al-Joumayly, -1

机译：pCL-类热塑性材料的介电性能的微波诊断和治疗应用
7. Fabrication and characterization of novel shape-stabilized stearic acid composite phase change materials with tannic-acid-templated mesoporous silica nanoparticles for thermal energy storage [O] . Yan Chen, Xiongjie Zhang, Beifu Wang, 2017

机译：新型形状稳定的硬脂酸复合相变材料与单宁酸模板型介孔二氧化硅纳米粒子进行制备及表征热能储存
8. Chalcogenide Materials Fabrication and Initial Characterization for Reconfigurable Interconnect Technology [R] . Taylor, P. C. 2006

机译：可重构互连技术的硫属化物材料制造和初步表征

Fabrication and characterization of mesoporous dielectric materials for ULSI interconnect applications

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