Application of multivariate statistical analysis to EDX investigations of interfacial composition using FEG-STEM

摘要

The use of multivariate statistics is described as a precursor to processing of EDX spectra. Spectra are factorised into independent, orthogonal sources of information. The physical origin of each source is identified, and those components corresponding to noise and artefacts excluded. The method is illustrated using segregation profiles across interfaces in steels acquired using a FEG-STEM. to improve sensitivity, and to remove coherent bremsstrahlung, artefacts and noise.