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Hybrid integration of polymer microlens with VCSEL using drop-on-demand technique

机译:使用滴落式技术与VCSEL的聚合物微透镜的杂化集成

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Polymer microlens fabrication techniques that enable easy integration with VCSELs are presented. We have developed a high-tolerance coupling structure with microlenses formed on both sides of the optical components for inter-chip optical interconnections, and have developed two types of drop-on- demand techniques for producing microlenses: an ink-jetting method and a dispensing method. Both methods use the surface tension of liquid UV-curable epoxy polymer. We have fabricated various microlenses that have a geometrical diameter from 20 $mu@m to over 1 mm with F/1 to F/12 by controlling the volume and viscosity of the droplets and their wettability to the substrate. The measured uniformity in arrayed lenses was within $POM 1 percent in lens diameter and $POM 3 $mu@m in pitch. Examples of how we have integrated microlenses with VCSELs are also presented. An ink-jetted microlens ona VCSEL coupled to a single-mode fiber enabled highly efficient coupling: 4 dB greater than without the microlens. A dispensed microlens on a VCSEL coupled to a multimode fiber increased the coupling efficiency by 20 dB compared to without a microlens. In the multimode case, large tolerances of $POM 2 mm in axial misalignment and $POM 10 $mu@m in lateral misalignment were obtained for a coupling loss increase of 1 dB.
机译:聚合物微透镜的制造技术,使与VCSEL的轻松集成介绍。我们已经开发了与形成在用于芯片间光学互连的光学部件的两侧的微透镜的高耐受性耦合的结构,并且已经开发两种类型的下拉式按需技术用于制造微透镜:一个喷墨法和分配方法。两种方法都使用液体UV可固化环氧聚合物的表面张力。我们已经制造,通过控制液滴的体积和粘度和它们的润湿性基底具有从20微米$ @ m至超过1mm与F / 1到F / 12的几何直径的各种微透镜。在排列的透镜的测量均匀性是$ POM 1%以内的透镜直径和$ POM 3 $亩@米间距。与VCSEL的我们如何整合微透镜的例子还提出。油墨喷出微透镜ONA VCSEL耦合到单模光纤使能高效耦合:4分贝大于没有微透镜。在耦合到多模光纤的VCSEL甲分配微透镜相比于没有微透镜以20 dB增加耦合效率。在多模情况下,对于1 dB的耦合损耗增加,获得在轴向未对准和$ 10 POM $亩@在横向偏移米的$ POM2毫米大的公差。

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