We report the fabrication of etched-groove silicon permeable base transistors (PBTs) with mushroom-shaped 0.2-0.4 ÃÂÿm wide source fingers. This structure enables both the passivation of the Si finger sidewalls and the reinforcement of the platinum gate with a gold overlayer. The low base resistance and the optimized doping profile yielded devices with fT and fmax values up to 26 GHz.
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机译:我们报告与蘑菇形的0.2-0.4×的宽源指的刻蚀沟槽的硅可渗透基极晶体管(PBTs)的制造。这种结构既可以钝化Si指侧壁,也可以用金覆盖层增强铂栅极。低基极电阻和优化的掺杂特性使得器件具有高达26 GHz的f T inf>和f max inf>值。
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