Effect of conventional fused silica preparation and deposition techniques on surface roughness, scattering and laser damage resistance

摘要

Despite the growing improvement in optical polishing and deposition technologies optical resistance of the laser components used for high-power UV applications remains insufficient in many cases. In this study influence of different fused silica substrate preparation, post treatment processing and deposition techniques are examined in terms of surface roughness, optical scattering and laser damage performance. The conventional techniques of polishing, etching, and finally surface cleaning of substrates have been investigated. Further, a part of samples were also coated with SiO_2 monolayer by Ion Beam Sputtering (IBS) technique. Surface quality was characterized prior to and after the treatment and deposition processes by the means of total integrated scattering (TIS) and atomic force microscopy (AFM). The experimental results of surface roughness measurements exhibited a good correlation between AFM and TIS methods. Further optical resistance was characterized with 10 ns duration pulses for 355 nm wavelength laser radiation performing 1-on-1 sample exposure test with high resolution micro-focusing approach. A dominating damage precursor ensembles produced during manufacturing processes were identified and directly compared. Finally, the conclusions about the quality influencing factors of investigated processes were drawn.