Precision Atomic Force Microscope Imaging

摘要

Topographic features on the surface of samples can be imaged by using a variety of profilometry methods. Atomic Force Microscopy (AFM), which relies on inter-atomic forces to extract topographical images of a sample is one such method that can be used on a wide range of surface types, with possible atomic resolution. However, when dealing with surfaces with high aspect ratio features, AFM images can be distorted by convolution artifacts, thus compromising the metrological accouracy of the image. In this paper, we discuss the mechanisms of AFM image formation and how they give rise to such distortions. Based on these mechanisms, we propose a deconvolution algorithm that aims at recovering the true sample topolgraphy from convolution-corrupted images. Limitations of this approcach are discussed and comparisons to other state of the art deconvolution schemes are made.