Study on three-dimensional microfabrication: (12th report) development of two-photon three-dimensional microfabrication

摘要

Three-dimensional microfabrication based on two-photon-initiated polymerization has been developed. In our method, movable microstructures are fabricated by fast scanning a focus through photopolymerizable resin. Therefore, unlike conventional micromachining, sacrificial layers are not needed. A micro gear (diameter: 25 μm) was fabricated within 7 minutes. This rapid fabrication is useful for mass production. The lateral resolutions have attained to 0.36 μm.