Development of a 200 kV field emission electron microscope and initial applications

摘要

(1) The cold field emission TEM has a higher source brightness than conventional instruments and allows elemental analysis of a small area which is 1/10 of conventional limit. The area of analysis is monitored through a TEM image during analysis so that a high positional accuracy of 2nm is assured.(2) The cold field emission TEM allows electron diffraction from a few nm area with high resolution index and high intensity. This indicates a formation of a small beam spot with a small illumination angle. It is a promising sign for a spot scanning TEM technique which may be useful for biological applications.We have reported elemental analysis via X-ray and electron diffraction of a nanometer area. The cold field emission TEM can be effectively applied to electron holography and convergent beam electron diffraction as well.