Electrostatic MEMS Planar Fan for Enhancement of Fluid Mixing

摘要

Electrostatic actuator-based MEMS planar fan with flaps of size of 900 μm by 300 μm were developed for the enhancement of fluid mixing. Bimorph deformation between gold strips and polysilicon plate was utilized to achieve the required gap scale (30 to 60 μm). To provide uniform deflection along the flap length direction, we have built up an optimization model. By optimizing the dimension and distribution of the gold strips, we have obtained an idea MEMS planar fan for control of the jet flow such as mixing enhancement and thrust vectoring. Numerical simulations were used in the design. The numerical model was verified by experimental results.