Ultra-Compact, Zero-Power Latching Linear Motor with Integrated Position Sensor for Portable Electronics

摘要

A large stroke, zero-power latching piezoelectrically actuated linear motor for portable electronics is designed, fabricated, and characterized. The actuator consists of a stator with a micromachined piezoelectric actuator and a metal guide with high permeability, and a permanent magnet rotor as well as an integrated position sensor. The completed actuator has a volume of 1mm(w)脳3mm(t)脳 5mm(l) with driving precision of 5 驴m at a scalable full-stroke of 5mm and a speed of 10mm/s at 50kHz of driving frequency. A built-in capacitive position sensor was able to determine the displacement of the rotor with a position sensitivity of 1fF/驴m.