Just-in-time AMHS delivery for 300 mm FAB

摘要

When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS's AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.