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Electromigration failure mechanism of Sn96.5Ag3.5 flip-chip solder bumps

机译:Sn96.5Ag3.5倒装焊锡凸块的电迁移失效机理

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The electromigration-induced failure of SnAg3.5 flip chip solder bumps was investigated at the current density of 1 /spl times/ 10/sup 4/ A/cm/sup 2/ at 150/spl deg/C, and they failed after 22 hours of current stressing. Failure was found to be on anode/chip side, and large (Cu,Ni)/sub 6/Sn/sub 5/ intermetallic compounds (IMCs) were observed on the interface of the UBM and the solder bump. A novel electromigration failure mechanism is proposed. Nickel atoms were migrated by electron flow from substrate side to chip side to form (Cu,Ni)/sub 6/Sn/sub 5/ IMCs. The volume expansion due to the IMC formation may induce local high stress around the UBM and fail the contact of the anode/chip side.
机译:在电流密度为1 / spl次/ 10 / sup 4 / A / cm / sup 2 /在150 / spl deg / C的条件下研究了SnAg3.5倒装芯片焊料凸点的电迁移引起的失效,在22/22℃后失效数小时的压力。发现故障发生在阳极/芯片侧,并且在UBM和焊料凸点的界面上观察到较大的(Cu,Ni)/ sub 6 / Sn / sub 5 /金属间化合物(IMC)。提出了一种新型的电迁移失效机制。镍原子通过电子流从衬底一侧迁移到芯片一侧,从而形成(Cu,Ni)/ sub 6 / Sn / sub 5 / IMC。由于IMC的形成而引起的体积膨胀会在UBM周围引起局部高应力,并使阳极/芯片侧的接触失效。

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