On-line extraction for thermal conductivity of surface-micromachined polysilicon thin films

摘要

A new test structure for extracting thermal conductivity of polysilicon thin films fabricated by surface-micromachining process is presented. The measurement method and thermal modeling are given, and the results are confirmed by ANSYS/spl trade/, The test structure can meet the requirements of on-line determination for the thermal conductivity of polysilicon thin films.