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Enabling Facility Re-Use for 300mm Semiconductor Manufacturing via Integration of Automated Material Handling System and Facility Design

机译：通过集成自动材料处理系统和工厂设计，使工厂可以重复使用300mm半导体

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《》|2006年|P.255-258|共4页
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Seall; S.; Steele; D.C.; Jung; M.;
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1. Integrated facility layout and material handling system design in semiconductor fabrication facilities [J] . Peters B.A., Taho Yang IEEE Transactions on Semiconductor Manufacturing . 1997,第3期

机译：半导体制造设施中的综合设施布局和材料处理系统设计
2. Modelling of material handling systems for facility design in manufacturing environments with job-specific routing [J] . Vatcharapol Sukhotu, Brett A. Peters International Journal of Production Research . 2012,第22a24期

机译：具有特定工作路线的制造环境中用于设施设计的物料搬运系统建模
3. Interbay automated material handling system stocker design for wafer fabrication facilities [J] . Chiahuang J. Lin, Taho Yang, Jose M. Padillo, International Journal of Manufacturing Technology and Management . 2000,第2a3期

机译：Interbay自动化材料处理系统仓库设计，用于晶圆制造设施
4. Enabling Facility Re-Use for 300mm Semiconductor Manufacturing via Integration of Automated Material Handling System and Facility Design [C] . Seall S., Steele D.C., Jung M. IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop . 2006

机译：通过集成自动材料处理系统和设施设计，使设施能够重新使用300mm半导体制造
5. Facility layout and material handling system design integration in manufacturing systems. [D] . Yang, Taho. 1996

机译：在制造系统中进行工厂布局和物料搬运系统设计集成。
6. Solving a mathematical model integrating unequal-area facilities layout and part scheduling in a cellular manufacturing system by a genetic algorithm [O] . Ahmad Ebrahimi, Reza Kia, Alireza Rashidi Komijan -1

机译：用遗传算法求解蜂窝制造系统中不等面积设施布局与零件调度集成的数学模型
7. A Spine Layout Design Method For Semiconductor Fabrication Facilities Containing Automated Material Handling Systems [O] . Taho Yang, Brett A. Peters 2007

机译：包含自动化材料处理系统的半导体制造设施的脊线布局设计方法
8. Development of an automated guided vehicle system for large scale materials211 handling of optics in the National Ignition Facility [R] . McMahon, D. H., Tiszauer, D., Yakuma, S. 1999

机译：开发用于大型材料的自动导引车系统211国家点火设施中的光学处理

Enabling Facility Re-Use for 300mm Semiconductor Manufacturing via Integration of Automated Material Handling System and Facility Design

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