Measurement of Plasma Density and Conductivity by Langmuir and R.F Probe in Different Conditions and Comparison with Theory

摘要

Summary form only given. We are currently performing experiments to measure the density and conductivity of plasma in an optimum pressure and magnetic field discharge. The plasma density and conductivity measured by RF and Langmuir probes and we expect to present the result obtained for plasma density and conductivity in argon, nitrogen and oxygen discharge. And then the obtained result compared with theorem. We will also discuss the possibility of sputtering thin films in the optimum conditions.