Applied of look up table controller based of FLC (fuzzy logic controller) in non-linear system AFM (atomic force microscopy)/PSTM (photon scanning tunnel microscope)

摘要

The problems of AFM/PSTM with piezoelectronic motor are how to control the fast and precise motion of the piezoelectronic because of its nonlinear hysteresis characteristic. On the other hand, in order to scan the surface and optical characteristics simultaneously in semiconductor material using AFM/PSTM, high speed microscope motion is required. FLC is one of the most effective algorithms to control a nonlinear system. This paper, the application of FLC to AFM/PSTM as a class nonlinear system is proposed. A look up table (LUT) controller based on FLC is used in order to overcome the quick response of the piezoelectronic motor. It was shown that the obtained images are noisy and the filter could not perfectly eliminate the noise. Nevertheless, the LUT controller based on FLC is able to overcome the nonlinear and noise problems well.