Applied of look up table controller based of FLC (fuzzy logic controller) in non-linear system: AFM (atomic microscopy)/PSTM (photon scanning tunnel microscope)

摘要

The problems of AFM/PSTM with piezoelectronic as motor are how to control the fast and precise motion of the piezoelectronic because of its nonlinear hysterisys characteristic. On the other hand in order to scan the surface and optical characteristic simultaneously in semiconductor material using ASM/PSTM the high speed of microscope motion is required. FLC is one of the most effective algorithms to control a nonlinear system. This paper, the application of FLC to AFM/PSTM as a class nonlinear system is proposed. Look Up Table (LUT) Controller based of FLC is used in order to overcome quick response of piezoelectronic. It was shown that the obtained images are noisy and the filter could not perfectly eliminate the noise. Nevertheless LUT based on FLC based on FLC is able to overcome the nonlinear and noise problems as well as.