Recent developments in micromachining techniques based on III-V-compounds have led to the fabrication of new sensing and actuator devices for a variety of applications in control and measurement systems as well as in optical communication. This work reports on various III-V-based MEMS concepts for sensing applications in the fields of mechanical engineering, microwave electronics and WDM systems for optical communication. The described devices include integrated GaAs/AlGaAs pressure sensors, thermoelectrical sensors for gas flow, infrared detection and RF power measurement. Micromachined Fabry-Perot Filters for dense WDM systems illustrate the integration of electromechanical and optical functions.
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