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A fully planarized 8M bit ferroelectric RAM with 'chain' cell structure

机译：具有“链”单元结构的完全平面化的8M位铁电RAM

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摘要

A 8M-bit fully functional ferroelectric RAM (FeRAM) with 0.25 /spl mu/m CMOS process was successfully fabricated by using a highly reliable Pt-SRO-PZT-SRO-Pt stacked capacitor and aluminum reflow based low damage metallization process. The chip area of 76 mm/sup 2/ was achieved by using a 'chain' cell structure.

机译：通过使用高度可靠的Pt-SRO-PZT-SRO-Pt堆叠电容器和基于铝回流的低损伤金属化工艺，成功制造了具有0.25 / spl mu / m CMOS工艺的8M位全功能铁电RAM（FeRAM）。通过使用“链”单元结构，可实现76 mm / sup 2 /的芯片面积。

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《》|2001年|P.113-114|共2页
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Ozaki; T.; Iba; J.; Kanaya; H.;
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中图分类无线电电子学、电信技术;
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专利

1. EXCELLENT PROPERTIES OF 0.15 MICROMETER FERROELECTRIC PZT CAPACITOR WITH SRO ELECTRODES FOR FUTURE GBIT-SCALE FERAMS [J] . HIROYUKI KANAYA, YOSHINORIKUMURA, YASUYUKI TANIGUCHI Integrated Ferroelectrics . 2001,第1a4期

机译：适用于未来GBIT规模陶瓷的0.15微米带Sro电极的铁电PZT电容器的优异性能
2. AMINO ACID SEQUENCE AND CARBOHYDRATE STRUCTURE OF A RECOMBINANT HUMAN TISSUE FACTOR PATHWAY INHIBITOR EXPRESSED IN CHINESE HAMSTER OVARY CELLS - ONE N- AND TWO O-LINKED CARBOHYDRATE CHAINS ARE LOCATED BETWEEN KUNITZ DOMAINS 2 AND 3 AND ONE N-LINKED C [J] . Nakahara Y, Miyata T, Hamuro T, Biochemistry . 1996,第20期

机译：中国仓鼠卵巢细胞中表达的重组人组织因子抑制剂的氨基酸序列和碳水化合物结构-一个N-和两个O-连接的碳水化合物链位于KUNITZ域2和3和一个N-连接之间
3. Structure and dynamics of ferroelectric liquid crystal cells exhibiting thresholdless switching - art. no. 021708 [J] . Copic M., Maclennan JE., Clark NA. Physical review, E. Statistical physics, plasmas, fluids, and related interdisciplinary topics . 2002,第2aPta1期

机译：呈现无阈值切换的铁电液晶单元的结构和动力学-技术领域。没有。 021708
4. A fully planarized 8M bit ferroelectric RAM with 'chain' cell structure [C] . Ozaki T., Iba J., Kanaya H., Symposium on VLSI Technology . 2001

机译：完全平坦化的8M位铁电RAM，具有“链”电池结构
5. T cell development and gamma/delta T cell antigen receptor: I. Structure and rearrangement of murine T cell antigen receptor delta chain gene. II. Expression of fetal type gamma/delta T cell receptor in adult transgenic mice and its effects on T cell development. [D] . Iwashima, Makio. 1990

机译：T细胞发育和γ/δT细胞抗原受体：I.鼠T细胞抗原受体δ链基因的结构和重排。二。胎儿型γ/δT细胞受体在成年转基因小鼠中的表达及其对T细胞发育的影响。
6. Airway Smooth Muscle Cells Synthesize Hyaluronan Cable Structures Independent of Inter-α-inhibitor Heavy Chain Attachment [O] . Mark E. Lauer, Csaba Fulop, Durba Mukhopadhyay, 1993

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7. Airway Smooth Muscle Cells Synthesize Hyaluronan Cable Structures Independent of Inter-α-inhibitor Heavy Chain Attachment*S⃞ [O] . Lauer, Mark E., Fulop, Csaba, Mukhopadhyay, Durba, 2008

机译：气道平滑肌细胞合成透明质酸电缆结构独立于α-抑制剂间重链附件*S⃞
8. Chevron Layer Structures in Surface Stabilized Ferroelectric Liquid Crystal(SSFLC) Cells Filled with a Material Which Exhibits the Chiral Nematic to Smectic C* Phase Transition [R] . Rieker, T. P., Clark, N. A., Safinya, C. R. 1991

机译：表面稳定铁电液晶（ssFLC）电池中的雪佛龙层结构填充材料，该材料表现出手性向列相对于近晶C *相变

A fully planarized 8M bit ferroelectric RAM with 'chain' cell structure

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