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Evaluation of mask soaking performance in the thermal stabilized vacuum chamber in an EB mask writer

机译：在EB掩模写入器中评估热稳定真空室中掩模的浸入性能

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摘要

In this paper, a new thermally stabilized vacuum chamber with improved soaking efficiency is constructed and its performance is evaluated.

机译：在本文中，构造了一种具有提高的均热效率的新型热稳定真空室，并对其性能进行了评估。

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《》|2003年|p.104-105|共2页
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Mitsui; S.; Akeno; K.; Ogasawara; M.; Tojo; T.;
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中图分类无线电电子学、电信技术 ;
关键词
masks; electron beam lithography; vacuum apparatus; mask soaking; thermal stabilized vacuum chamber; EB mask writer;

机译：掩模;电子束光刻;真空装置;掩模浸泡;热稳定真空室; EB掩模写入器;

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专利

1. Evaluation of Mask Soaking Performance in a Thermally Stabilized Vacuum Chamber in an Electron Beam Mask Writer [J] . Soichiro MITSUI, Kiminobu AKENO, Munehiro OGASAWARA, Japanese Journal of Applied Physics. Part 1, Regular Papers & Short Notes . 2004 ,第6B期

机译：电子束掩模写入器中热稳定真空室中掩模浸泡性能的评估
2. X-ray mask delineation performances by advanced EB writer EB-X3 [J] . M. Ezaki, Y. Nakayama, Y. Kikuchi, 電子情報通信学会技術研究報告. シリコン材料·デバイス. Silicon Devices and Materials . 2000 ,第477期

机译：先进的EB刻录机EB-X3的X射线光罩描绘性能
3. X-ray mask delineation performances by advanced EB writer EB-X3 [J] . M. Ezaki, Y. Nakayama, Y. Kikuchi, 電子情報通信学会技術研究報告. シリコン材料·デバイス. Silicon Devices and Materials . 2000 ,第477期

机译：高级EB Writer EB-X3的X射线面具描绘表演
4. Evaluation of mask soaking performance in the thermal stabilized vacuum chamber in an EB mask writer [C] . Mitsui S., Akeno K., Ogasawara M., International Microprocesses and Nanotechnology Conference . 2003

机译：EB掩模作家中热稳定真空室中掩模浸泡性能的评价
5. An investigation of print quality defects: Psychophysical evaluation of content masking, development of web-based troubleshooting tools, and analysis of sharp roller bands [D] . Zhang, Jia. 2016

机译：印刷品质缺陷的调查：内容掩蔽的心理物理评估，基于网络的故障排除工具的开发，以及锋利滚子带的分析
6. Facial Skin Temperature and Discomfort When Wearing Protective Face Masks: Thermal Infrared Imaging Evaluation and Hands Moving the Mask [O] . Antonio Scarano, Francesco Inchingolo, Felice Lorusso 2020

机译：戴防护口罩时面部皮肤的温度和不适：热红外成像评估和动手移动口罩
7. Reusable and Recyclable Graphene Masks with Outstanding Superhydrophobic and Photothermal Performances [O] . -1

机译：可重复使用和可回收的石墨烯面膜，具有出色的超疏水和光热表演
8. Part I. Unmanned Evaluation of the USN MK 1Mod 0Mask in Umbilical and Emergency Modes. Part II. Manned Human Engineering Evaluation of USN MK 1Mod 0Mask in Tethered Scuba Configuration. [R] . middleton,james r. brady,john i. jr 1978

机译：第一部分：UsN mK 1mod 0在脐带和紧急模式下的无人评估。第二部分。 UsN mK 1mod的载人人工工程评估0系留在系留水肺配置中。

Evaluation of mask soaking performance in the thermal stabilized vacuum chamber in an EB mask writer

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