A Schottky emitter using boron-doped diamond

机译：使用掺硼金刚石的肖特基发射极

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In this paper, we demonstrate fabrication of a diamond Schottky emitter with integrated heating element by hot filament chemical vapor deposition on silicon substrate and characterisation by SEM. The diamond emitter provided an emission current of 800nA in the electric field.

机译：在本文中，我们演示了通过在硅基板上进行热丝化学气相沉积和SEM表征，制造具有集成加热元件的金刚石肖特基发射极。金刚石发射器在电场中提供了800nA的发射电流。

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《》|2003年|p.247-248|共2页
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Joon Hyung Bae; Minh; P.N.; Ono; T.; Esashi; M.;
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中图分类无线电电子学、电信技术 ;
关键词
diamond; elemental semiconductors; semiconductor thin films; boron; Schottky effect; chemical vapour deposition; electron field emission; Schottky emitter; boron-doped diamond; integrated heating element; hot filament chemical vapor deposition; silicon s;

机译：金刚石;元素半导体;半导体薄膜;硼;肖特基效应;化学气相沉积;电子场发射;肖特基发射极;掺硼金刚石;集成加热元件;热丝化学气相沉积;硅;

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专利

1. Schottky emitter using boron-doped diamond [J] . Bae JH, Minh PN, Ono T, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2004 ,第3期

机译：使用掺硼金刚石的肖特基发射极
2. Characterization of capacitance-voltage features of Ni/diamond Schottky diodes on oxidized boron-doped homoepitaxial diamond film [J] . Y. G. Chen, M. Ogura, H. Okushi, Diamond and Related Materials . 2003 ,第8期

机译：氧化硼掺杂同质外延金刚石膜上镍/金刚石肖特基二极管电容-电压特性的表征
3. Ohmic and Schottky contacts of hydrogenated and oxygenated boron-doped single-crystal diamond with hill-like polycrystalline grains [J] . Jing-Cheng Wang, Hao Chen, Lin-Feng Wan, 中国物理：英文版 . 2021 ,第009期

机译：邻接和氧化硼掺杂单晶金刚石的欧姆和肖特基触点，含有山的多晶硅颗粒
4. A SCHOTTKY EMITTER USING BORON-DOPED DIAMOND [C] . Joon Hyung Bae, Phan NgocMinh, Takahito Ono, International Vaccum Microelectronics Conference . 2003

机译：使用硼掺杂钻石的肖特基发射器
5. Homoepitaxial deposition of boron-doped single crystal diamond. [D] . Karna, Sunil Kumar Lal. 2013

机译：掺硼单晶金刚石的同质外延沉积。
6. Effect of Boron-Doped Diamond Interlayer on Cutting Performance of Diamond Coated Micro Drills for Graphite Machining [O] . Xuelin Lei, Liang Wang, Bin Shen, 2013

机译：掺硼金刚石夹层对石墨加工金刚石涂层微钻切削性能的影响
7. Raman scattering in boron-doped single-crystal diamond used to fabricate Schottky diode detectors [O] . Faggio G, Messina G, Santangelo S, 2012

机译：用于制造肖特基二极管探测器的掺硼单晶金刚石中的拉曼散射
8. High-Temperature Point-Contact Transistors and Schottky Diodes Formed on Synthetic Boron-Doped Diamond [R] . Geis, M. W., Rathman, D. D., Ehrlich, D. J., 1987

机译：合成硼掺杂金刚石上形成的高温点接触晶体管和肖特基二极管

A Schottky emitter using boron-doped diamond

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