Deposition of functional organic thin films by laser ablation using UV and VUV lasers

摘要

The production of a wide variety of films by laser ablation has been actively studied. Particularly, excimer laser ablation has shown excellent capability for production of high-temperature ceramic superconducting films and epitaxial films of ferroelectric ceramics with well-defined material structures. Although there is less experimental results available on organic thin film deposition with ultraviolet laser ablation, various organic polymer or even non-polymer organic materials have been reconstructed via laser ablation. Compared with vacuum evaporation technique, which is widely used to fabricate organic thin films, the laser ablation deposition process is more suitable for producing multi-layered hetero-structures under laser pulse control. Moreover, when taking advantages of other prospects in laser ablation, some novel processings are realizable. In this paper, our previous studies on the organic thin film fabrication via UV and VUV lasers are reviewed, and also some new directions of the development are proposed with relating primitive experimental results.