Low pressure growth of diamond films under fluorine addition

摘要

Phase diagrams in the C-H-F system for low pressure diamond growth have been calculated in the usual conditions: 0.1-6.67 kPa, 900-1100 K, and the agreements with experiments are good. A series of ternary phase diagrams imply that the suitable composition for low pressure diamond growth in C-H-F system is confined in the small CH/sub 4/-H-HF triangle. There is no diamond growth region while F/(F+H)<0.5, only a HF-CF/sub 4/ line appears. The diamond growth region changes greatly with substrate temperature and fluorine concentration.