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Nanomechanical Properties of CN/sub x/ Overcoats with Different Deposition Bias and Multiple-Layer Properties of DLC Films on Si

机译：具有不同沉积偏差的CN / sub x /外涂层的纳米力学性能和Si上DLC膜的多层性能

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《》|1998年|P.252-252|共1页
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Hsiao; R.; Bogy; D.B.;
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中图分类无线电电子学、电信技术;
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专利

1. Nanomechanical properties of CN/sub x/ overcoats and cathodic arc carbon (CAC) films [J] . Hsiao R.C., Bogy D.B. IEEE Transactions on Magnetics . 1998,第4期

机译：CN / sub x /外涂层和阴极电弧碳（CAC）膜的纳米力学性能
2. Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique [J] . Wang J, Liu GC, Xu J, Plasma Science & Technology . 2010,第4期

机译：等离子体增强化学气相沉积（PECVD）技术沉积的类金刚石碳（DLC）膜的纳米力学和电化学性质
3. Nanomechanical and Electrochemical Properties of Diamond-Like Carbon （DLC） Films Deposited by Plasma Enhanced Chemical Vapor Deposition （PECVD） Technique [J] . 王静, 刘贵昌, 徐军, 等离子体科学和技术：英文版 . 2010,第004期

机译：等离子体增强化学气相沉积（PECVD）技术沉积类金刚石碳（DLC）薄膜的纳米力学和电化学性能
4. Nanomechanical Properties of CN/sub x/ Overcoats with Different Deposition Bias and Multiple-Layer Properties of DLC Films on Si [C] . Hsiao R., Bogy D.B., Institute of Electric and Electronic Engineer Joint MMM-Intermag Conference . 1998

机译：不同沉积偏压的CN / Sub X /外涂层的纳米机械性能及DLC膜对Si的多层性质
5. Synthesis and tribological properties of DLC film by RF PACVD: Effect of processing parameters. [D] . Desai, Pruthul. 2009

机译：射频PACVD合成DLC薄膜及其摩擦学性能：工艺参数的影响。
6. Deposition of boron doped DLC films on TiNb and characterization of their mechanical properties and blood compatibility [O] . Shahira Liza, Junko Hieda, Hiroki Akasaka, 2017

机译：在TiNb上沉积硼掺杂DLC膜及其机械性能和血液相容性的表征
7. Deposition of diamond like carbon (DLC) and C-N films using ion beam assisted deposition (IBAD) technique and evaluation of their properties [O] . J Prabhjyot Pal, S C Patil, S B Ogale, 1994

机译：使用离子束辅助沉积（IBAD）技术及其性质的评估，沉积金刚石（DLC）和C-N薄膜

Nanomechanical Properties of CN/sub x/ Overcoats with Different Deposition Bias and Multiple-Layer Properties of DLC Films on Si

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