Influence of different lead precursors on the microstructure and properties of sol-gel PZT thin films

摘要

Sol-gel derived Pb(Zr/sub 0.53/Ti/sub 0.47/)O/sub 3/ films were prepared by spin coating on platinum coated silicon wafers. The sol for deposition was prepared from Zr and Ti alkoxides and different lead precursors-standard lead acetate hydrate and a new lead oxide based precursor. Crystallisation, microstructure and hysteresis properties of these films were studied and compared in order to reveal the features of the two synthesis methods employed.