A micro-Pirani gauge with a heat transfer efficiency of 99% to the ambient has been fabricated in 1.2 /spl mu/m CMOS technology. Device operation is based on the heat transfer from an active current-heated polysilicon coil to the ambient which includes a passive coil. The active coil temperature and hence, resistance, is modulated by the pressure or thermal conductivity of the surrounding gas. The device has a peak sensitivity of 400 mV/torr and its power ranges from 27 /spl mu/W at vacuum to 2 mW at 1 atm. Design and fabrication details of the structure are presented along with simulation and measurement results.
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机译：微型皮拉尼真空计的传热效率为99％，采用1.2 / spl mu / m CMOS技术制成。器件的运行基于从有源电流加热的多晶硅线圈到周围环境（包括无源线圈）的热传递。有效线圈温度以及因此的电阻由周围气体的压力或导热率调节。该器件的峰值灵敏度为400 mV / torr，功率范围从真空下的27 / spl mu / W到1 atm下的2 mW。给出了结构的设计和制造细节以及仿真和测量结果。
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