An efficient method for computing the 2D and 3D capacitance matrix of multiconductor interconnects in a multilayered dielectric medium is presented. The method is applicable to conductors of arbitrary polygonal shape embedded in a multilayered dielectric medium with possible ground planes on the top or bottom of the dielectric layers. The computation time required to evaluate the space-domain Green's function for the multilayered medium, which involves an infinite summation, has been greatly reduced by obtaining a closed-form, using a finite number of images in the spectral domain. The corresponding space-domain Green's functions are then obtained using the proper closed-form integrations. The elements of the moment matrix are computed using the closed-form formulation, avoiding any numerical integration. The proposed method shows good agreement when compared with other published results.
展开▼
