A large-scale SPC implementation using the IBM multimedia SPC program

摘要

The implementation of statistical process control (SPC) in the chemical vapor deposition (CVD) process area of a semiconductor wafer fabricator is described. Advanced self-study interactive video/computer training and a series of cross-functional meetings were used for problem solving. The training that production employees received enabled them to enhance their basic statistical knowledge and skills, while cross-functional group meetings served as the vehicle for bringing that knowledge and experience together in the manufacturing environment to establish SPC online controls.