TRANSDUCERS '91. 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers (Cat. No.91CH2817-5)

摘要

The following topics are dealt with: flow sensors; actuators; biosensors; accelerometers; gas sensors; pressure sensors; material characterization; chemical sensors; acoustic sensors; optical sensors; interface electronics; resonant sensors; robotics; thermal sensors; surface micromachining; optical microtransducers; sensor materials; radiation-interactive sensors; microactuators; integrated systems and packaging; actuators and valves; and magnetic sensors.