Ion temperature in an electron cyclotron resonance plasma as determined by laser induced fluorescence Doppler width measurements

摘要

Summary form only given. The transverse ion temperature in an electron cyclotron resonance (ECR) plasma was determined by measuring the Doppler-broadened line shape of a suitable N/sup +//sub 2/ transition using laser-induced fluorescence (LIF) techniques. LIF is a noninvasive means of measuring the transverse ion temperature, which offers good spatial resolution, as opposed to a line-integrated emission measurement. The perpendicular ion temperature in this nitrogen plasma was measured on axis 30 cm downstream from the ECR region. Over a range of neutral pressures (0.5 mtorr>or=P>or=4mtorr,), the transverse ion temperature was found to vary from 0.35 eV to 0.15 eV. Although the parallel ion energy has not been measured in this device, it is expected to be comparable to the decrease in plasma potential measured between the ECR source and downstream regions.