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Low-spatial coherence electrically pumped red-emitting semiconductor laser

机译:低空间相干电泵浦红光发射半导体激光器

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摘要

High spatial coherence can maintain the beam stability of the laser after a long distance. However, it limits the applications in laser display including projection and imaging system, because the high coherence of laser diodes cause the artifacts such as speckle. In this work, we design a novel 6xx nm chaotic cavity laser diode, which consists of a D-shaped section used to achieve a large number of independent spatial modes thus reduce coherence and a stripe area to improve power. The radius of the D-shaped cavity is 500 μm and the length of stripe is 1000 μm. The red laser based on GaAs substrate is fabricated by standard photolithography and reactive ion etching process. To obtain an enough optical confinement by effective refractive index step, the etching depth exceeds the active region. The high-power chaotic cavity low-spatial coherence electrically pumped semiconductor laser is first realized with the wavelength around 630 nm. The spectrum width of 15 nm at full width at half maximum (FWHM) and output power of 300 mW is obtained under pulse operation. The speckle contrast is measured to be 5%, showing great potential of reducing speckle from the source directly for laser display.
机译:高空间相干性可以在长距离后保持激光器的光束稳定性。然而,由于激光二极管的高相干性导致诸如斑点的伪像,因此限制了在包括投影和成像系统的激光显示器中的应用。在这项工作中,我们设计了一种新颖的6xx nm混沌腔激光二极管,该二极管由D形截面组成,用于实现大量独立的空间模式,从而减小了相干性,并减小了条纹区域,从而提高了功率。 D形腔的半径为500μm,条带的长度为1000μm。通过标准光刻和反应离子刻蚀工艺制造了基于GaAs衬底的红色激光器。为了通过有效折射率步骤获得足够的光学限制,蚀刻深度超过了有源区。高功率混沌腔低空间相干电泵浦半导体激光器首先实现了约630 nm的波长。在脉冲操作下,半高全宽(FWHM)的光谱宽度为15 nm,输出功率为300 mW。经测量,斑点对比度为5%,显示出很大的潜力可以直接从激光显示器上减少光源的斑点。

著录项

  • 来源
    《Semiconductor lasers and applications VIII》|2018年|108120V.1-108120V.6|共6页
  • 会议地点 Beijing(CN)
  • 作者单位

    State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences No.l9A Yuquan Road, Beijing, 100049, China;

    State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences No.l9A Yuquan Road, Beijing, 100049, China;

    State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences No.l9A Yuquan Road, Beijing, 100049, China;

    State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences No.l9A Yuquan Road, Beijing, 100049, China;

    State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences No.l9A Yuquan Road, Beijing, 100049, China;

    State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,Laboratory of Solid State Optoelectronics Information Technology, Institute of Semiconductors, CAS No. 35A, Qinghua East Road, Haidian District, Beijing 100083, China,College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences No.l9A Yuquan Road, Beijing, 100049, China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    low-spatial coherence; red-emitting semiconductor lasers; laser display;

    机译:低空间连贯性;红光半导体激光器;激光显示;

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