All solid-state 193nm source with 5mJ pulse energy

摘要

Using CBO crystal as the final mixing nonlinear optical crystal, we generated 5mJ/pulse at 193nm. The high pulse energy at 193nm is a result of several factors. The efficiency of CBO is about three times better than that of LBO, and an order of magnitude better than BBO. Novel designs in 4th and 5th harmonic generators using readily available BBO crystals allow the stable, efficient and repetitive generation of high pulse energy at the 5th harmonic of 1064nm.