Abstract: We developed a novel sensing equipment for the measurement of roughness and waviness of rolls during grinding. The sensors can operate on different materials, in harsh conditions, and measurements can be performed on-line, in a non-contact fashion. The sensing equipment makes use of a commercial triangulation sensor, suitably integrated with an additional optical head. The triangulator produces two signals, respectively proportional to the distance from the target surface and to the intensity of the scattered light. The optical head consists of two photodiodes placed in the proximity of the excitation beam and produces a signal proportional to the intensity of the light scattered at smaller angle. The distance signal is used to extract the waviness information, whereas its combination with the intensity of the light scattered both at large and small angles is necessary to derive the roughness information. The resulting sensor is able to measure waviness and roughness in the spatial wavelength ranges of 1 mm $DIV 100 mm and 0.1 mm $DIV 1 mm respectively; with height range of the defects equal to 200 nm $DIV 5 micrometer. The measurement uncertainty is less than 2.5% and the linearity is 1% of the measuring range. !5
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机译：摘要：我们开发了一种新颖的传感设备，用于测量磨削过程中辊的粗糙度和波纹度。传感器可以在恶劣的条件下以不同的材料运行，并且可以非接触方式在线进行测量。传感设备使用了一个商业三角测量传感器，该传感器适当地与一个附加的光学头集成在一起。三角测量器产生两个信号，分别与距目标表面的距离和散射光的强度成比例。光学头由两个位于激发光束附近的光电二极管组成，并产生与以较小角度散射的光的强度成比例的信号。距离信号用于提取波纹度信息，而将其与以大角度和小角度散射的光的强度相结合对于得出粗糙度信息是必需的。所得的传感器能够分别在1 mm $ DIV 100 mm和0.1 mm $ DIV 1 mm的空间波长范围内测量波纹度和粗糙度；缺陷的高度范围等于200 nm $ DIV 5微米。测量不确定度小于2.5％，线性度为测量范围的1％。 ！5
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