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Portable optical sensor for surface roughness measurements

机译:便携式光学传感器,用于表面粗糙度测量

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An optical sensor based on a reflective method to measure the roughness of a surface (Ra) compares the light reflected from the surface being measured with that of light reflected from a standard surface of known Ra. The range of Ra values that can be measured is 0.05-1.3 mu m. the sensor was tested in factory conditions to determine the surface roughness of a mill roll during grinding. The results corresponded with those from a profilometer within 10 percent. The measurement of surface roughness in factory conditions is usually performed using contact profilometers in which a stylus is drawn over the surface and a trace of the undulations recorded. However, vibrations frequently take place during the trace as a result of various nearby activities, this significantly decreasing the accuracy of measurement. For such conditions, optical reflectometers, which have a low sensitivity to vibrations, are very attractive for surface roughness measurements~[1]. However, this method requires a knowledge of the optical constants of the surface measured and the angular distribution of scattered light intensity ~[1,2], if absolute values are to be determined. To avoid this problem, an optical sensor calibrated against standard surfaces of known roughness has been developed and tested under factory conditions.
机译:一种基于反射法测量表面粗糙度(Ra)的光学传感器,将从被测表面反射的光与从已知Ra标准表面反射的光进行比较。可以测量的Ra值范围是0.05-1.3μm。在工厂条件下对传感器进行了测试,以确定研磨过程中轧辊的表面粗糙度。结果与轮廓仪的结果相差不到10%。在工厂条件下,表面粗糙度的测量通常使用接触轮廓仪进行,其中在表面上绘制了一个测针并记录了痕迹。但是,由于附近的各种活动,在跟踪过程中经常发生振动,这大大降低了测量的准确性。在这种情况下,对振动敏感度低的光学反射仪对于表面粗糙度测量[1]非常有吸引力。但是,如果要确定绝对值,此方法需要了解所测表面的光学常数和散射光强度的角分布〜[1,2]。为了避免这个问题,已经开发出了针对已知粗糙度的标准表面进行校准的光学传感器,并在工厂条件下进行了测试。

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