Laser damage to optical components induced by surface chromium particles

摘要

To obtain better understanding of particulate contamination, chromium dots (50 x 50 μm~2) were deposited on a silica substrate by photolithography. The aim in using this sample is to observe the mechanism of damage initiation that can be attributed to surface contamination of micro-metric size. A Nd:YAG laser irradiated the sample at 1064 nm for different fluences and also different numbers of shots. Several methods were used to characterise the laser effects on the chromium dots and the silica substrate: "Nomarski", "atomic force" and photothermal microscope observations. The laser fluence is found to be the most important parameter for the behaviour of the chromium dots. At low fluence ( < 1 J/cm~2), they become cracked (fractured). At medium fluence (around 1 J/cm~2) chromium fusion is reached and chromium oxide appears. Finally at higher fluence (3 J/cm~2), although chromium dots are blown off the substrate and small damage to silica occurs on the first shot, the subsequent shots do not lead to a dramatic increase in the damage.